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Arizona State University - Optical and X-Ray Characterization 

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  • Public/Government Institute

Optical and X-Ray Characterization
 at 
Coursera 
Overview

Duration

4 hours

Total fee

Free

Mode of learning

Online

Official Website

Explore Free Course External Link Icon

Credential

Certificate

Optical and X-Ray Characterization
Table of content
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  • Overview
  • Highlights
  • Course Details
  • Curriculum

Optical and X-Ray Characterization
 at 
Coursera 
Highlights

  • Earn a certificate from Arizona State University
  • Add to your LinkedIn profile
  • November 2023
  • 5 quizzes
Read more
Details Icon

Optical and X-Ray Characterization
 at 
Coursera 
Course details

What are the course deliverables?
  • What you'll learn
  • Describe the use of light to measure the thickness and refractive index of thin transparent films.
  • Explain how light is absorbed and emitted by semiconductors.
  • Explain the advantages and limitations of optical and X-ray characterization.
More about this course
  • Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.

Optical and X-Ray Characterization
 at 
Coursera 
Curriculum

Course Introduction

Introduction to This Course

Instructor Bio

Course Tips and Video Information

Week 5.1: Reflectance Spectroscopy

5.1.1: Reflectance Spectroscopy

5.1.2: Worked Example

Suggested Reading: Spectral Reflectance (optional)

Check Your Knowledge (CYK)

Week 5.2: Ellipsometry

5.2: Ellipsometry

Suggested Reading: Ellipsometry Tutorial (optional)

Check Your Knowledge (CYK)

Week 5.3: Photoluminescence

5.3: Photoluminescence

Suggested Reading: Fundamentals of Spectroscopy (optional)

Check Your Knowledge (CYK)

Week 5.4: Electron Microprobe X-Ray Analysis

5.4.1: Electron Microprobe X-ray Analysis

5.4.2: Examples of Electron Microprobe Analysis

Check Your Knowledge (CYK)

Week 5.5: Course Wrap-up and Project

Case Study Solution: Electron Microbe Project

Electron Microprobe Analysis of 45 nm MOSFETs

Project Self-reflection

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Optical and X-Ray Characterization
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